Miniaturized Thermal Acoustic Gas Sensor based on a CMOS Microhotplate and MEMS Microphone


In this work we present a novel thermal acoustic gas sensor, fabricated using a CMOS microhotplate and MEMS microphone. The sensing mechanism is based on detecting changes in the thermal acoustic conversion efficiency which is dependent on the physical properties of the gas. The gas sensor has all the benefits of CMOS technology, including low cost and miniaturization. Here we demonstrate its application for CO2 gas detection.

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4th International Conference nanoFIS 2020 - Functional Integrated nano Systems

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